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"Composition of Metal Layers in CMOS-MEMS Micromachining Process."
Benito Granados-Rojas et al. (2019)
- Benito Granados-Rojas, Mario Alfredo Reyes-Barranca, Luis Martín Flores-Nava, Griselda Stephany Abarca-Jimenez, Miguel Ángel Aleman-Arce, Yesenia Eleonor González-Navarro:
Composition of Metal Layers in CMOS-MEMS Micromachining Process. CCE 2019: 1-4
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