"3-layered capacitive structure design for MEMS inertial sensing."

Benito Granados-Rojas et al. (2016)

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DOI: 10.1109/ICEEE.2016.7751236

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-21

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Benito Granados-Rojas, Mario Alfredo Reyes-Barranca, G. S. Abarca-Jimenez, Luis M. Flores-Nava, Jose A. Moreno-Cadenas:
3-layered capacitive structure design for MEMS inertial sensing. CCE 2016: 1-5

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