"Modal analysis of a structure used as a capacitive MEMS accelerometer sensor."

G. S. Abarca-Jimenez et al. (2014)

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DOI: 10.1109/ICEEE.2014.6978263

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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G. S. Abarca-Jimenez, Mario Alfredo Reyes-Barranca, Salvador Mendoza-Acevedo, J. E. Munguia-Cervantes, Miguel Ángel Aleman-Arce:
Modal analysis of a structure used as a capacitive MEMS accelerometer sensor. CCE 2014: 1-4

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