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"A zinc dioxide-on-silicon MEMS resonator for narrowband filtering."
Mortada Ossama et al. (2014)
- Mortada Ossama, Pierre Blondy, Aurelian Crunteanu, Matthieu Chatras, Jean-Christophe Orlianges
:
A zinc dioxide-on-silicon MEMS resonator for narrowband filtering. ICECS 2014: 586-589

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