"3D nanovision for the inspection of micro-electro-mechanical systems."

Chris Kammerud et al. (2005)

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DOI: 10.1109/ICECS.2005.4633376

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Chris Kammerud, Besma R. Abidi, Shafik Huq, Mongi A. Abidi:
3D nanovision for the inspection of micro-electro-mechanical systems. ICECS 2005: 1-4

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