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"3D simulation of thin-film bulk acoustic wave resonators (FBAR)."

Sylvain Giraud et al. (2006)

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DOI: 10.1109/ICECS.2006.379969

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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  dblp key:
  - conf/icecsys/GiraudBAC06
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  - https://dblp.org/rec/conf/icecsys/GiraudBAC06
Sylvain Giraud, Stephane Bila, Michel Aubourg, Dominique Cros:
3D simulation of thin-film bulk acoustic wave resonators (FBAR). ICECS 2006: 1038-1041

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