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"Effect of the membrane flatness defect on the offset voltage of a silicon ..."

Zohir Dibi, Ali Boukabache, Patrick Pons (2003)

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DOI: 10.1109/ICECS.2003.1301933

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Zohir Dibi, Ali Boukabache, Patrick Pons:
Effect of the membrane flatness defect on the offset voltage of a silicon piezoresistive pressure sensor. ICECS 2003: 902-905

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