"Resonant-based test method for MEMS devices."

Ali Dianat et al. (2014)

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DOI: 10.1109/ICECS.2014.7050012

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-17

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Ali Dianat, Ali Attaran, Rashid Rashidzadeh, Roberto Muscedere:
Resonant-based test method for MEMS devices. ICECS 2014: 423-426

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