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"An ADRC-based CZ Silicon Single Crystal Growth Control Technology."

Zhiguo Wu et al. (2022)

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DOI: 10.1145/3548608.3559253

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-26

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Zhiguo Wu, Lizhong Shui, Shuguang Liu, Zijian Wang:
An ADRC-based CZ Silicon Single Crystal Growth Control Technology. ICCIR 2022: 508-512

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