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"Optimally minimizing overlay violation in self-aligned double patterning ..."

Zigang Xiao et al. (2013)

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DOI: 10.1109/ICCAD.2013.6691094

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - https://dblp.org/rec/conf/iccad/XiaoDTW13
Zigang Xiao, Yuelin Du, Haitong Tian, Martin D. F. Wong:
Optimally minimizing overlay violation in self-aligned double patterning decomposition for row-based standard cell layout in polynomial time. ICCAD 2013: 32-39

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