"Design dependent process monitoring for back-end manufacturing cost reduction."

Tuck-Boon Chan et al. (2010)

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DOI: 10.1109/ICCAD.2010.5654280

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Tuck-Boon Chan, Aashish Pant, Lerong Cheng, Puneet Gupta:
Design dependent process monitoring for back-end manufacturing cost reduction. ICCAD 2010: 116-122

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