"Energy method for the optimization of a silicon resonant accelerometer."

Jing Zhang et al. (2016)

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DOI: 10.1109/I2MTC.2016.7520377

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-23

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Jing Zhang, Qin Shi, Yan Su, An Ping Qiu:
Energy method for the optimization of a silicon resonant accelerometer. I2MTC 2016: 1-6

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