"Data Mining and Support Vector Regression Machine Learning in ..."

Benjamin Lenz, Bernd Barak (2013)

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DOI: 10.1109/HICSS.2013.163

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Benjamin Lenz, Bernd Barak:
Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology. HICSS 2013: 3447-3456

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