"Vertical integration of submicron MOSFETs in two separate layers of SOI ..."

John P. Denton, Sang Woo Pae, Gerold W. Neudeck (2001)

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DOI: 10.1145/368122.368897

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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John P. Denton, Sang Woo Pae, Gerold W. Neudeck:
Vertical integration of submicron MOSFETs in two separate layers of SOI islands formed by silicon epitaxial lateral overgrowth. ACM Great Lakes Symposium on VLSI 2001: 129-132

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