""MEMS de Piano"- an experimental course of design, fabrication, and ..."

Yoshio Mita et al. (2014)

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DOI: 10.1109/EWME.2014.6877420

access: closed

type: Conference or Workshop Paper

metadata version: 2019-08-01

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Yoshio Mita, Masanori Kubota, Matthieu Denoual, Eric Lebrasseur, Tomoki Sawamura:
"MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator. EWME 2014: 171-176

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