"Evaluation of Electron Scattering in High-Resolution X-Ray Mask Fabrication."

G. Messina et al. (1992)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2023-06-01

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  dblp key:
  - conf/eurosim/MessinaPST92
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  - https://dblp.org/rec/conf/eurosim/MessinaPST92
G. Messina, A. Paoletti, S. Santangelo, A. Tucciarone:
Evaluation of Electron Scattering in High-Resolution X-Ray Mask Fabrication. EUROSIM 1992: 497-504

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