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"Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer ..."

Samuel G. Webster et al. (2002)

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DOI: 10.1007/3-540-45706-2_61

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  - conf/europar/WebsterGRC02
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Samuel G. Webster, Matthias K. Gobbert, Jean-François Remacle, Timothy S. Cale:
Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer Deposition (Research Note). Euro-Par 2002: 452-456

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