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"ANOVA model based moving window approach for RtR control in high-mix ..."

D. Ling et al. (2013)

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DOI: 10.23919/ECC.2013.6669239

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-09

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  dblp key:
  - conf/eucc/LingZFFZ13
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D. Ling, Y. Zheng, H. J. Fang, H. J. Fan, J. Zhao:
ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry. ECC 2013: 3949-3954

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