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"Accurate Measurements of Small Resistances in Vertical Interconnects with ..."

Michele Stucchi, Ferenc Fodor, Erik Jan Marinissen (2020)

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DOI: 10.1109/ETS48528.2020.9131579

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-15

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  dblp key:
  - conf/ets/StucchiFM20
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Michele Stucchi, Ferenc Fodor, Erik Jan Marinissen:
Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios. ETS 2020: 1-6

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