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"Identification of Process Models and Controller Design for Vacuum Coating ..."

Helmuth Kubin et al. (2009)

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DOI: 10.1109/ETFA.2009.5347078

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-02

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Helmuth Kubin, Thomas Unkelbach, Manfred Benesch, Frank-Holm Rögner, Alexander Dementjev, Klaus Kabitzsch, Christoph Metzner:
Identification of Process Models and Controller Design for Vacuum Coating Processes with a Long Dead time using an Identification Tool with Advisory Support. ETFA 2009: 1-8

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