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"Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering ..."

Amita Rawat et al. (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631815

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Amita Rawat, Krishna K. Bhuwalka, Philippe Matagne, Bjorn Vermeersch, Hao Wu, Geert Hellings, Julien Ryckaert, Changze Liu:
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks. ESSDERC 2021: 55-58

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