"Epitaxial growth and diffusion characteristics analysis of vertical thin ..."

Sung-Kun Park et al. (2017)

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DOI: 10.1109/ESSDERC.2017.8066631

access: closed

type: Conference or Workshop Paper

metadata version: 2017-10-19

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Sung-Kun Park, Donghyun Woo, Min-Ki Na, Pyong-Su Kwag, Ho-Ryeong Lee, Kyoung-Wook Ro, Kyung-Hwan Kim, Dong-Kyu Lee, Chris Hong, In-Wook Cho, Kyung-Dong Yoo:
Epitaxial growth and diffusion characteristics analysis of vertical thin poly-Si channel transfer gate structured pixels for 3D CMOS image sensor. ESSDERC 2017: 220-223

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