"Integration and Reliability Aspects of Low-Temperature and Au-free ..."

Anthony Calzolaro, Thomas Mikolajick, Andre Wachowiak (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631788

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Anthony Calzolaro, Thomas Mikolajick, Andre Wachowiak:
Integration and Reliability Aspects of Low-Temperature and Au-free Ta/Al-based Ohmic Contacts for AlGaN/GaN MIS-HEMTs. ESSDERC 2021: 307-310

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