"Impact of a 10nm Ultra-Thin BOX (UTBOX) and Ground Plane on FDSOI devices ..."

Claire Fenouillet-Béranger et al. (2009)

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DOI: 10.1109/ESSCIRC.2009.5325994

access: closed

type: Conference or Workshop Paper

metadata version: 2026-01-07

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Claire Fenouillet-Béranger, Pierre Perreau, S. Denorme, L. Tosti, François Andrieu, Olivier Weber, S. Barnola, C. Arvet, Y. Campidelli, Sébastien Haendler, R. Beneyton, C. Perrot, C. de Buttet, P. Gros, Loan Pham-Nguyen, F. Leverd, P. Gouraud, F. Abbate, F. Baron, Alphonse Torres, C. Laviron, L. Pinzelli, J. Vetier, C. Borowiak, A. Margain, D. Delprat, F. Boedt, Konstantin Bourdelle, Bich-Yen Nguyen, Olivier Faynot, Thomas Skotnicki:
Impact of a 10nm Ultra-Thin BOX (UTBOX) and Ground Plane on FDSOI devices for 32nm node and below. ESSCIRC 2009: 88-91

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