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"Solid state RF MEMS resonators in standard CMOS."

Bichoy Bahr et al. (2013)

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DOI: 10.1109/ESSCIRC.2013.6649119

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-24

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Bichoy Bahr, Radhika Atul Marathe, Wentao Wang, Dana Weinstein:
Solid state RF MEMS resonators in standard CMOS. ESSCIRC 2013: 249-252

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