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"A micro opto-mechanical displacement sensor based on micro-diffraction ..."

Dino Accoto et al. (2013)

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DOI: 10.1109/EMBC.2013.6610600

access: closed

type: Conference or Workshop Paper

metadata version: 2020-12-29

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Dino Accoto, Emiliano Schena, M. Cidda, Maria Teresa Francomano, Paola Saccomandi, Sergio Silvestri:
A micro opto-mechanical displacement sensor based on micro-diffraction gratings: Design and characterization. EMBC 2013: 4714-4717

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