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"AN electrical equivalent circuit model For RF MEMS disk resonators."

Timo Veijola (2007)

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DOI: 10.1109/ECCTD.2007.4529758

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-29

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Timo Veijola:
AN electrical equivalent circuit model For RF MEMS disk resonators. ECCTD 2007: 962-965

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