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"Excitation of multiple spatial modes of a MEMS cantilever in the pulsed ..."

Elena Blokhina, Orla Feely, Manuel Domínguez (2009)

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DOI: 10.1109/ECCTD.2009.5275002

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-21

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  - conf/ecctd/BlokhinaFD09
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Elena Blokhina, Orla Feely, Manuel Domínguez:
Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator. ECCTD 2009: 331-334

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