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"Technology of fabrication and functional validations of planar-Nothing On ..."

Cristian Ravariu et al. (2018)

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DOI: 10.1109/ECAI.2018.8679031

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-13

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Cristian Ravariu, Florin Babarada, Dan Mihaiescu, Elena Manea, Catalin Parvulescu, A. Popescu:
Technology of fabrication and functional validations of planar-Nothing On Insulator devices with oxide instead vacuum. ECAI 2018: 1-4

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