"Design and fabrication of low pinch-off voltage 700V lateral 4H-SiC MESFET ..."

Atsushi Shimbori, Alex Q. Huang (2021)

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DOI: 10.1109/DRC52342.2021.9467247

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Atsushi Shimbori, Alex Q. Huang:
Design and fabrication of low pinch-off voltage 700V lateral 4H-SiC MESFET with thin RESURF layer. DRC 2021: 1-2

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