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"Overlay-Aware Detailed Routing for Self-Aligned Double Patterning ..."

Iou-Jen Liu, Shao-Yun Fang, Yao-Wen Chang (2014)

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DOI: 10.1145/2593069.2593176

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Iou-Jen Liu, Shao-Yun Fang, Yao-Wen Chang:
Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process. DAC 2014: 50:1-50:6

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