"Simultaneous EUV Flare Variation Minimization and CMP Control with ..."

Chi-Yuan Liu et al. (2014)

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DOI: 10.1145/2593069.2593215

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Chi-Yuan Liu, Hui-Ju Katherine Chiang, Yao-Wen Chang, Jie-Hong R. Jiang:
Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification. DAC 2014: 54:1-54:6

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