"Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate ..."

Lars Liebmann et al. (2001)

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DOI: 10.1145/378239.378333

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Lars Liebmann, Jennifer Lund, Fook-Luen Heng, Ioana Graur:
Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate Level: Design Rules and Design Rule Checking. DAC 2001: 79-84

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