"A Numerical Simulation of Motion of Particles under the Wafer in CMP."

Hao Zhang, Yuanqiang Tan, Mingjun Li (2008)

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DOI: 10.1109/CSSE.2008.463

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Hao Zhang, Yuanqiang Tan, Mingjun Li:
A Numerical Simulation of Motion of Particles under the Wafer in CMP. CSSE (3) 2008: 31-34

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