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"Doping of Aluminum Nitride and the Impact on Thin Film Piezoelectric and ..."

Roy H. Olsson III, Zichen Tang, Michael J. D'Agati (2020)

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DOI: 10.1109/CICC48029.2020.9075911

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-16

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Roy H. Olsson III, Zichen Tang, Michael J. D'Agati:
Doping of Aluminum Nitride and the Impact on Thin Film Piezoelectric and Ferroelectric Device Performance. CICC 2020: 1-6

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