"Three-dimensional integration technology using through-si via based on ..."

Mitsumasa Koyanagi, Takafumi Fukushima, Tetsu Tanaka (2010)

Details and statistics

DOI: 10.1109/CICC.2010.5617626

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-27

a service of  Schloss Dagstuhl - Leibniz Center for Informatics