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"Estimation and control of surface roughness in thin film growth using ..."

Yiming Lou, Panagiotis D. Christofides (2002)

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DOI: 10.1109/CDC.2002.1184495

access: closed

type: Conference or Workshop Paper

metadata version: 2022-03-08

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Yiming Lou, Panagiotis D. Christofides:
Estimation and control of surface roughness in thin film growth using kinetic Monte-Carlo models. CDC 2002: 223-231

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