"A multi-step supervisory control strategy for semiconductor device ..."

Christopher A. Harrison et al. (2004)

> Home

Details and statistics

DOI: 10.1109/CDC.2004.1429417

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-09

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/cdc/HarrisonGKQ04
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/cdc/HarrisonGKQ04
Christopher A. Harrison, Richard Good, Daniel Kadosh, S. Joe Qin:
A multi-step supervisory control strategy for semiconductor device manufacturing. CDC 2004: 4237-4242

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.