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"Charge-based femto-farad capacitance measurement technique for MEMS ..."

Adrian Tanskanen, Behraad Bahreyni, Marek Syrzycki (2016)

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DOI: 10.1109/CCECE.2016.7726623

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-29

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Adrian Tanskanen, Behraad Bahreyni, Marek Syrzycki:
Charge-based femto-farad capacitance measurement technique for MEMS applications. CCECE 2016: 1-4

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