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"Quantitative Capacitance Measurements of MOS Structures using a Scanning ..."

Michael Ott et al. (2006)

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DOI: 10.1109/CCECE.2006.277784

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Michael Ott, Jason Abt, Udit Sharma, Edward Keyes, Trevor J. Hall, Henry Schriemer:
Quantitative Capacitance Measurements of MOS Structures using a Scanning Probe Microscope. CCECE 2006: 842-845

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