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"Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under ..."
Robert W. Johnstone, M. Parameswaran (2006)
- Robert W. Johnstone, M. Parameswaran:
Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under Differing Residual Stresses. CCECE 2006: 1617-1620
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