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"Si based MEMS near-infrared photodetector and application for oxygen ..."

Tetsuo Kan, Yukiko Maruyama, Yoshiharu Ajiki (2017)

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DOI: 10.1109/CBS.2017.8266096

access: closed

type: Conference or Workshop Paper

metadata version: 2018-02-03

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Tetsuo Kan, Yukiko Maruyama, Yoshiharu Ajiki:
Si based MEMS near-infrared photodetector and application for oxygen saturation measurement. CBS 2017: 194-197

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