"Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools."

Qinghua Zhu et al. (2013)

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DOI: 10.1109/COASE.2013.6653915

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-05

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Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou:
Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools. CASE 2013: 862-867

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