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"Electrostatic torsional micromirror: Its active control and applications ..."

Ya-Jun Pan, Yuan Ma, Shariful Islam (2008)

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DOI: 10.1109/COASE.2008.4626443

access: closed

type: Conference or Workshop Paper

metadata version: 2021-11-12

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Ya-Jun Pan, Yuan Ma, Shariful Islam:
Electrostatic torsional micromirror: Its active control and applications in optical network. CASE 2008: 151-156

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