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"Polynomial time optimal algorithm for stencil row planning in e-beam ..."

Daifeng Guo, Yuelin Du, Martin D. F. Wong (2015)

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DOI: 10.1109/ASPDAC.2015.7059083

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Daifeng Guo, Yuelin Du, Martin D. F. Wong:
Polynomial time optimal algorithm for stencil row planning in e-beam lithography. ASP-DAC 2015: 658-664

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