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"Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning."

Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang (2015)

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DOI: 10.1109/ASPDAC.2015.7059085

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-01

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Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang:
Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning. ASP-DAC 2015: 671-676

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