"Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning."

Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang (2015)

> Home

Details and statistics

DOI: 10.1109/ASPDAC.2015.7059085

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-01

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/aspdac/FangTC15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/aspdac/FangTC15
Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang:
Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning. ASP-DAC 2015: 671-676

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.