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"Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning."
Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang (2015)
- Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang
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Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning. ASP-DAC 2015: 671-676
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