"Hybrid lithography optimization with E-Beam and immersion processes for ..."

Yuelin Du et al. (2012)

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DOI: 10.1109/ASPDAC.2012.6165047

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Yuelin Du, Hongbo Zhang, Martin D. F. Wong, Kai-Yuan Chao:
Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design. ASP-DAC 2012: 707-712

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