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"Flexible packed stencil design with multiple shaping apertures for e-beam ..."

Chris Chu, Wai-Kei Mak (2014)

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DOI: 10.1109/ASPDAC.2014.6742879

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Chris Chu, Wai-Kei Mak:
Flexible packed stencil design with multiple shaping apertures for e-beam lithography. ASP-DAC 2014: 137-142

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