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"A Novel Etch Scheme to Form Sloped Profile by Standard Anisotropic CMOS ..."

Ming Li, Xiaoxu Kang, Xiaolan Zhong (2021)

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DOI: 10.1109/ASICON52560.2021.9620422

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-06

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  dblp key:
  - conf/asicon/LiKZ21a
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  - https://dblp.org/rec/conf/asicon/LiKZ21a
Ming Li, Xiaoxu Kang, Xiaolan Zhong:
A Novel Etch Scheme to Form Sloped Profile by Standard Anisotropic CMOS Process. ASICON 2021: 1-4

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