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"Design and modeling of MEMS resonator for magnetic field sensing using ..."

Farooq Ahmad et al. (2010)

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DOI: 10.1109/APCCAS.2010.5775024

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Farooq Ahmad, John Ojur Dennis, Nor Hisham Hamid, Mohd Haris M. Khir, Abdelaziz Yousif Ahmed:
Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique. APCCAS 2010: 827-830

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